Author Affiliations
Abstract
State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027, China
A dispersive white-light spectral interferometer for precise measurements of the phase properties of multilayer thin film structures is built. A novel wavelet-based differentiation approach that considerably resists measurement error of group delay (GD) and group delay dispersion (GDD) is introduced. Versatile applications beyond phase measurement of the apparatus are demonstrated, including piezoelectric coefficient determination and physical thickness retrieval. With the increase of demand for thin film structures with specific phase properties, this white-light spectral interferometer can play an important role in future thin film industry.
频域干涉 频谱分析 光学薄膜 100.6640 Superresolution 210.4770 Optical recording 180.1790 Confocal microscopy Chinese Optics Letters
2010, 8(s1): 99